Effect of CH4 Flow Rate on the Tribological Behaviors of TiCN Films against Si3N4 Ceramic and Steel Ball

Control of the structural, mechanical and tribological properties TiCN films play an important role in its numerous applications, including cutting tools, components, aeronautical biomedical engineering industries. Direct-current magnetron sputtering (DCMS) system was applied to deposit onto n-type silicon (100) at room temperature. The Ti-TiN interlayer used enhance adhesive strength between coating substrate. composition microstructure were studied using X-ray photoelectron spectroscopy (XPS) field-emitted scanning electron microscopy (FESEM). as a function methane (CH4) flow ratio then characterized nano-indentation measurements. behavior investigated by UMT-2MT tribometer against Si3N4 ceramic AISI52100 steel ball. After tests, wear rate obtained 3D surface profiler component content debris evaluated energy dispersive (EDS). results show that are CH4 rates. film 10 sccm possesses minimum average COF value 0.1964 reaches 72,000 cycles ball over test duration. Furthermore, only 2.076 × 10−6 mm3/N·m. exhibited longer lifespan than under normal load 1 N, indicating present better lubricative when low-hardness counterparts high-hardness counterparts.